{"id":706,"date":"2004-07-21T00:00:00","date_gmt":"2004-07-21T00:00:00","guid":{"rendered":"https:\/\/www.ltb-berlin.de\/en\/?p=706"},"modified":"2025-02-11T14:10:05","modified_gmt":"2025-02-11T14:10:05","slug":"elias-iii-echelle-spectrometer-20-fm-fwhm-resolution-at-a-wavelength-of-193-nm","status":"publish","type":"post","link":"https:\/\/www.ltb-berlin.de\/en\/elias-iii-echelle-spectrometer-20-fm-fwhm-resolution-at-a-wavelength-of-193-nm\/","title":{"rendered":"ELIAS III Echelle Spectrometer \u2013 20 fm FWHM Resolution at a Wavelength of 193 nm"},"content":{"rendered":"\n<p>LTB Lasertechnik Berlin has delivered the first units of its latest spectrometer generation, <a href=\"\/products\/elias\/\">ELIAS III<\/a>, to several lithography laser manufacturers.<\/p>\n\n\n\n<p>The ELIAS III can measure a minimum line width of 20 fm full width at half maximum (FWHM) at a wavelength of 193 nm, corresponding to a spectral resolution of 10 million. To measure such a narrow line width, it is essential to prove the resolution capability and system function of the spectrometer using a laser with a significantly narrower spectral width. For this reason, LTB acquired the first 193 nm &#8220;Indigo-DUV&#8221; laser from Coherent, with an FWHM of 6 fm, in Europe. Since purchasing such a laser is a significant investment, LTB offers commercial use of this laser in its in-house application laboratory to interested parties.<\/p>\n\n\n\n<p>The ELIAS III series is offered with a spectral resolution of 20 fm FWHM (i.e., 150 MHz or 0.005 cm-1) at 193 nm and 175 fm E95. The internationally accepted definition for characterizing the spectral purity of lithography lasers is to measure the spectral width in which 95% of the energy is contained. Such a measurement is only possible if it can be done with a very high signal-to-noise ratio (typically 20,000, &gt; 40 dB). Compared to Fabry-Perot spectrometers, which can easily measure half-widths in the stated range, it is also possible to quantitatively analyze the foot region and the spectral surroundings.<\/p>\n\n\n\n<p>ELIAS III is the latest patented model in the series of ultra-high-resolution spectrometers developed by LTB in collaboration with the Institute for Spectrochemistry and Applied Spectroscopy (ISAS) Berlin.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>LTB Lasertechnik Berlin has delivered the first units of its latest spectrometer generation, ELIAS III, to several lithography laser manufacturers. The ELIAS III can measure a minimum line width of 20 fm full width at half maximum (FWHM) at a wavelength of 193 nm, corresponding to a spectral resolution of 10 million. To measure such [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":861,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[28],"tags":[],"class_list":["post-706","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"_links":{"self":[{"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/posts\/706","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/comments?post=706"}],"version-history":[{"count":3,"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/posts\/706\/revisions"}],"predecessor-version":[{"id":1401,"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/posts\/706\/revisions\/1401"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/media\/861"}],"wp:attachment":[{"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/media?parent=706"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/categories?post=706"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ltb-berlin.de\/en\/wp-json\/wp\/v2\/tags?post=706"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}