Cymer and LTB Lasertechnik Berlin to jointly develop next-Generation DUV Spectrometer

New Tool to Enable Tighter Spectral-Performance Measurement for Advanced Light Sources.

Cymer, Inc. (Nasdaq NM: CYMI), the world’s leading supplier of excimer light sources used in semiconductor manufacturing, and LTB Lasertechnik Berlin GmbH, a leading developer of short-pulse lasers and laser measuring equipment, today announced they have entered an agreement to jointly develop an advanced spectrometer for measuring the spectral performance of deep-ultraviolet (DUV) light sources.

Spectral performance refers to the spectral purity of the light sources used in photolithography steppers. Advanced steppers’ refraction objectives necessitate light sources with extremely high spectral purity, measured in femtometers. Cymer’s ongoing development of leading-edge light sources necessitates a more advanced spectrometer capable of measuring the performance of its next-generation products.

Under the terms of the agreement, LTB will design, manufacture and distribute a next-generation version of its Emission Line Analyzing Spectrometer (ELIAS), for which the company will also provide field service. Cymer will provide intellectual property and standardize the interpretation of measurement data to enhance the spectrometer’s performance, and will have exclusive marketing and sales rights in the semiconductor lithography market.

According to Dr. Matthias Scholz, managing director of LTB Lasertechnik Berlin, “Partnering with Cymer will enable us to build on the proven capabilities of our ELIAS system to produce a spectrometer that surpasses currently available spectral-measurement technologies by anticipating the metrology needs of advanced DUV light sources such as those Cymer is currently developing. In addition, utilizing Cymer’s extensive supply chain will help broaden the market opportunity for our products.”

Ted Holtaway, Cymer’s senior vice president of operations and business process management, commented, “This agreement with LTB will be highly valuable in helping us meet our product roadmap. We expect to begin shipping light sources based on our new Master Oscillator Power Amplifier, or MOPA, technology early next year. These advanced light sources will require very high-resolution spectral metrology tools for customers to receive the highest possible value for their investment. We believe LTB possesses the quality, reliability and measurement expertise to deliver such a tool, and we’re pleased to be working with them on this new spectrometer—enabling us to play an important role in setting the standard for light source performance measurement going forward.”

Forward Looking Statements
Statements in this press release that are not strictly historical in nature are forward-looking statements. These statements include, but are not limited to, references to Cymer’s ongoing development of leading edge light sources; LTB developing, designing, manufacturing and distributing a new spectrometer; Cymer providing intellectual property, marketing and sales services, and having exclusive rights to the product; Cymer expecting to begin delivering its MOPA light source early next year; LTB being able to provide products with the quality, reliability and measurement capability needed; and Cymer playing an important role in setting the standard for measuring light source performance going forward. These statements are only predictions based on current information and expectations and involve a number of risks and uncertainties. Actual events or results may differ materially from those projected in such statements due to various factors, including but not limited to: the possibility that LTB will not be able to deliver a product that performs up to expectations, and another company setting the standard in light source metrology; the demand for semiconductors in general, and, in particular, for leading-edge devices with smaller geometries; the rate at which semiconductor manufacturers take delivery of photolithography tools from the company’s customers; delays or cancellations by customers of their orders; new and enhanced product offerings by competitors; the timing of customer orders, shipments and acceptances; inability by the company to meet its production and/or product development schedules; inability of the company to secure adequate supplies of critical components for its advanced products; and failure by the company to manage its expense levels and unanticipated expenses. For a discussion of these and other factors which may cause our actual events or results to differ from those projected, please refer to the company’s most recent annual report on Form
10-K and quarterly reports on Form 10-Q, as well as other subsequent filings with the Securities and Exchange Commission.

LTB Lasertechnik Berlin GmbH is a leading developer and provider of short-pulse lasers, laser-based measuring systems and measuring instruments for lasers. Further information on the company may be obtained on the Internet at

Cymer, Inc. is the world’s leading supplier of excimer laser illumination sources, the essential light source for deep ultraviolet (DUV) photolithography systems. DUV lithography is a key enabling technology, which has allowed the semiconductor industry to meet the exact specifications and manufacturing requirements for volume production of today’s advanced semiconductor chips. Further information on Cymer may be obtained from the Company’s SEC filings, the Internet at or by contacting the company directly.