The world's highest spectral resolution commercial echelle spectrometer series with Littrow arrangement - for the spectral measurement of emission and absorption lines, particularly in excimer laser lithography.
The ELIAS Emission Line Analyzing Spectrometer models belong to a worldwide unique monochromator series, with which a spectrally high-resolution quantitative measurement of narrowband laser lines with an intensity dynamic range of up to four orders of magnitude is possible. By using a CCD camera with a signal-to-noise ratio of up to 40,000, the line profiles can be detected simultaneously within their spectral environment. The patented optical design based on an echelle grating has an almost diffraction-limited imaging quality with a sufficiently high linear dispersion to be able to resolve the half-widths of the lines with 5 to 10 pixels at the typical pixel widths of the line detectors.
The use of a 360 mm wide echelle grating within a Littrow arrangement allows a single, double or even quadruple pass, depending on the ELIAS version. This allows either extremely precise line characterization with extremely high resolution or a larger inspection area analysis with reduced resolution and higher sensitivity. A camera focal length of 10 m is achieved with a 2.5 m offaxis paraboloid mirror and downstream anamorphic magnification optics with a tangential reproduction scale of 4:1.
The ELIAS spectrometers are thermally and mechanically extremely stable and have fully motorized optomechanics for automatic focusing and alignment of the spectrum to the detector. Chromatic aberrations are avoided by using reflective optics with broadband UV coatings. The radiation is coupled into the spectrometer via an SMA fiber or pure reflection transfer optics.
With the supplied Sophi software, all functions of the spectrometer-detector unit are controlled via an intuitive graphical user interface. A scan measurement mode enables the sequential measurement of a larger wavelength range than the spectrometer’s free spectral range. An optional LabVIEW library enables complete remote control of the ELIAS and thus integration into complex test stations.
The optical design of all models in the ELIAS series is identical to the standard ELIAS I version.
| Specification | ELIAS I | ELIAS II | ELIAS III: | ELIAS LD | WAVEMETER |
|---|---|---|---|---|---|
| Basic specifications | |||||
| Optical design | Echelle monochromator in Littrow arrangement | ||||
| Aperture ratio | f/50 | f/50 | f/50 | f/50 | f/50 |
| Slit width | 25 x 1,000 µm | 25 x 1,000 µm | 25 x 1,000 µm | 25 x 1,000 µm | 25 x 1,000 µm |
| Wavelength range | 190 - 1,100 nm | 190 - 550 nm | 190 - 550 nm | 190 - 550 nm | 190 - 550 nm |
| Spectral resolution FWHM | 85 - 240 fm | 60 - 170 fm | 22 - 63 fm | — | — |
| Accuracy of the wavelength dial | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp | better than ± 5 pm after calibration with internal mercury lamp |
| Simultaneous inspection area | 15 - 98 pm | 16 - 200 pm | 8 - 100 pm | 52 - 625 pm | 52 - 625 pm |
| Lineardispersion* | 0,02 nm / mm ( @ 193 nm) | 0,01 nm / mm ( @ 193 nm) | 0,005 nm / mm ( @ 193 nm) | 0,08 nm / mm (bei 193 nm) | 0,08 nm / mm (bei 193 nm) |
| Dimensions without detector (L x W x H) | 1.400 x 310 x 250 | 1.400 x 310 x 250 | 1.400 x 310 x 250 | 1.400 x 310 x 250 | 1.400 x 310 x 250 |
| Weight without detector | 50 kg | 50 kg | 50 kg | 50 kg | 75 kg |
| Special features | — | — | — | — | — |
| Detector & System | |||||
| Detector | CCD –2.048 px | CCD –2.048 px | CCD –2.048 px | CCD –1.024 px | CCD –1.024 px |
| Exposure time, min. | 2 ms | 2 ms | 2 ms | 2 ms | 2 ms |
| Dynamic range | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 | 16-bit AD conversion, realistic approx. 33,000:1 |
| Light injection | fibre optic or free beam | fibre optic or free beam | fibre optic or free beam | fibre optic or free beam | fibre optic or free beam |
| Wavelength calibration | with internal calibration lamp (253.652 nm) | with internal calibration lamp (253.652 nm) | with internal calibration lamp (253.652 nm) | with internal calibration lamp (253.652 nm) | with internal calibration lamp (253.652 nm) |
| Control | — | — | — | — | — |
| Software | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional | Sophi, LabVIEW library optional |
ELIAS |
DEMON |
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